RF Sputtering y DC Sputtering

[fusion_builder_container type=”flex” hundred_percent=”no” hundred_percent_height=”no” hundred_percent_height_scroll=”no” align_content=”stretch” flex_align_items=”flex-start” flex_justify_content=”flex-start” hundred_percent_height_center_content=”yes” equal_height_columns=”no” container_tag=”div” hide_on_mobile=”small-visibility,medium-visibility,large-visibility” status=”published” border_style=”solid” box_shadow=”no” box_shadow_blur=”0″ box_shadow_spread=”0″ gradient_start_position=”0″ gradient_end_position=”100″ gradient_type=”linear” radial_direction=”center center” linear_angle=”180″ background_position=”center center” background_repeat=”no-repeat” fade=”no” background_parallax=”none” enable_mobile=”no” parallax_speed=”0.3″ background_blend_mode=”none” video_aspect_ratio=”16:9″ video_loop=”yes” video_mute=”yes” absolute=”off” absolute_devices=”small,medium,large” sticky=”off” sticky_devices=”small-visibility,medium-visibility,large-visibility” sticky_transition_offset=”0″ 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filter_invert_hover=”0″ filter_sepia_hover=”0″ filter_opacity_hover=”100″ filter_blur_hover=”0″ animation_type=”” animation_direction=”left” animation_speed=”0.3″ animation_offset=”” last=”true” border_position=”all” first=”true”][fusion_text columns=”” column_min_width=”” column_spacing=”” rule_style=”default” rule_size=”” rule_color=”” font_size=”” line_height=”” letter_spacing=”” text_color=”” content_alignment_medium=”” content_alignment_small=”” content_alignment=”justify” animation_type=”” animation_direction=”left” animation_speed=”0.3″ animation_offset=”” hide_on_mobile=”small-visibility,medium-visibility,large-visibility” sticky_display=”normal,sticky” class=”” id=””]El desarrollo de procesos de fabricación de dispositivos como sensores y circuitos integrados (ASICs) y materiales como son semiconductores, dieléctricos y metales con características físicas específicas, es bastante requerido y de suma importancia en todos los proyectos que atendemos en la Dirección de 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Proceso de depósito de materiales por magnetrón Sputtering

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Uno de los equipos con el que cuenta el cuarto limpio en CIDESI Querétaro, es un sistema “magnetron Sputtering”, de la marca Angstrom Engineering, este sistema es utilizado por varios usuarios en proyetos de investigación y fabricación de sensores y circuitos integrados, ver Fig.1. Es importante saber, que la técnica de depósito conocida como “Sputtering” o erosión catódica, se encuentra dentro de los métodos más nobles para la obtención de materiales con características específicas, esto por su reproducibilidad, escalabilidad y versatilidad de procesos que se pueden realizar en este sistema, por esto y más, es el consentido del área de metalización en el cuarto limpio de CIDESI Querétaro.

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Fig. 1. El sistema magnetron Sputtering del cuarto limpio de CIDESI Querétaro es utilizado en varios proyectos de investigación y desarrollo tecnológico como sensores y circuitos integrados.

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Sistema magnetron Sputtering y el proceso de depósito de materiales

[/fusion_title][/fusion_builder_column][/fusion_builder_row][/fusion_builder_container][fusion_builder_container type=”flex” hundred_percent=”no” hundred_percent_height=”no” hundred_percent_height_scroll=”no” align_content=”stretch” flex_align_items=”flex-start” flex_justify_content=”flex-start” hundred_percent_height_center_content=”yes” equal_height_columns=”no” container_tag=”div” hide_on_mobile=”small-visibility,medium-visibility,large-visibility” status=”published” border_style=”solid” box_shadow=”no” box_shadow_blur=”0″ box_shadow_spread=”0″ gradient_start_position=”0″ gradient_end_position=”100″ gradient_type=”linear” radial_direction=”center center” linear_angle=”180″ background_position=”center center” background_repeat=”no-repeat” fade=”no” background_parallax=”none” enable_mobile=”no” parallax_speed=”0.3″ background_blend_mode=”none” video_aspect_ratio=”16:9″ video_loop=”yes” video_mute=”yes” absolute=”off” absolute_devices=”small,medium,large” sticky=”off” sticky_devices=”small-visibility,medium-visibility,large-visibility” sticky_transition_offset=”0″ scroll_offset=”0″ animation_direction=”left” animation_speed=”0.3″ filter_hue=”0″ filter_saturation=”100″ filter_brightness=”100″ filter_contrast=”100″ filter_invert=”0″ filter_sepia=”0″ filter_opacity=”100″ filter_blur=”0″ filter_hue_hover=”0″ filter_saturation_hover=”100″ filter_brightness_hover=”100″ filter_contrast_hover=”100″ filter_invert_hover=”0″ filter_sepia_hover=”0″ filter_opacity_hover=”100″ filter_blur_hover=”0″][fusion_builder_row][fusion_builder_column type=”1_1″ layout=”1_1″ align_self=”auto” content_layout=”column” align_content=”flex-start” valign_content=”flex-start” content_wrap=”wrap” spacing=”” center_content=”no” link=”” target=”_self” min_height=”” hide_on_mobile=”small-visibility,medium-visibility,large-visibility” sticky_display=”normal,sticky” class=”” id=”” type_medium=”” type_small=”” order_medium=”0″ order_small=”0″ dimension_spacing_medium=”” dimension_spacing_small=”” dimension_spacing=”” dimension_margin_medium=”” dimension_margin_small=”” margin_top=”” margin_bottom=”” padding_medium=”” padding_small=”” padding_top=”” padding_right=”” padding_bottom=”” padding_left=”” hover_type=”none” border_sizes=”” border_color=”” border_style=”solid” border_radius=”” box_shadow=”no” dimension_box_shadow=”” box_shadow_blur=”0″ box_shadow_spread=”0″ box_shadow_color=”” box_shadow_style=”” background_type=”single” gradient_start_color=”” gradient_end_color=”” gradient_start_position=”0″ gradient_end_position=”100″ gradient_type=”linear” radial_direction=”center center” linear_angle=”180″ background_color=”” background_image=”” background_image_id=”” background_position=”left top” background_repeat=”no-repeat” background_blend_mode=”none” render_logics=”” filter_type=”regular” filter_hue=”0″ filter_saturation=”100″ filter_brightness=”100″ filter_contrast=”100″ filter_invert=”0″ filter_sepia=”0″ filter_opacity=”100″ filter_blur=”0″ filter_hue_hover=”0″ filter_saturation_hover=”100″ filter_brightness_hover=”100″ filter_contrast_hover=”100″ filter_invert_hover=”0″ filter_sepia_hover=”0″ filter_opacity_hover=”100″ filter_blur_hover=”0″ animation_type=”” animation_direction=”left” animation_speed=”0.3″ animation_offset=”” last=”true” border_position=”all” first=”true”][fusion_text columns=”” column_min_width=”” column_spacing=”” rule_style=”default” rule_size=”” rule_color=”” font_size=”” line_height=”” letter_spacing=”” text_color=”” content_alignment_medium=”” content_alignment_small=”” content_alignment=”justify” animation_type=”” animation_direction=”left” animation_speed=”0.3″ animation_offset=”” hide_on_mobile=”small-visibility,medium-visibility,large-visibility” sticky_display=”normal,sticky” class=”” id=””]En un proceso normal de depósito por “Sputtering”, la cámara principal, donde se realiza el depósito de materiales, se evacua hasta alcanzar un alto vacío, comúnmente una presión menor a 2 x 10^-6 Torr. El Sputtering del cuarto limpio de CIDESI Querétaro utiliza una bomba mecánica y una bomba turbo molecular para alcanzar esta presión base. Después de alcanzar la presión base, puede comenzar la etapa de depósito, donde un gas ionizante, en este caso argón, fluye dentro de la cámara. En esta etapa, tanto la presión, como el flujo de argón se regulan hasta alcanzar presiones, típicamente, en el orden de los mTorr, este gas argón, es el gas que va a formar el plasma. Es importante conocer que alcanzar un alto vacio dentro de la cámara es importante para reducir las presiones parciales de gases de elementos no deseables y que potencialmente puedan contaminar los materiales que se están depositando.

La técnica de depósito Sputtering está dentro de las técnicas consideradas de depósito físico en fase de vapor. El principio físico de operación de un sistema Sputtering, consiste en la generación de un plasma, el cual se va a obtener al aplicar una diferencia de potencial entre un cátodo y un ánodo, posteriormente, los electrones que se encuentran en el gas Argón, que en este punto ya están dentro de la cámara principal, son acelerados en dirección contraria al cátodo, lo que causa colisiones de estos electrones con los átomos de Argón. Estas colisiones generan repulsión electrostática, y promueven la ionización del gas Argón, debido a la remoción de electrones de los átomos de este gas. Comúnmente, el cátodo se encuentra en contacto con el material que se depositara y el ánodo, se encuentra conectado a la cámara del Sputering haciendo la funcion de tierra eléctrica. En este punto, los iones cargados positivamente son acelerados hacia el cátodo, que está cargado negativamente, lo que ocasiona colisiones de alta energía en la superficie del target, y cada una de estas colisiones, propicia que átomos de la superficie del material sean erosionados con la suficiente energía cinética para que estos viajen desde el target y se depositen en un substrato, todo esto, en un parcial vacío dentro de la cámara de depósito. El gas ionizante, que comunmente es argón o xenón, son seleccionados y utilizados por ser un gas de alto peso molecular, ver Fig. 2.[/fusion_text][/fusion_builder_column][/fusion_builder_row][/fusion_builder_container][fusion_builder_container type=”flex” hundred_percent=”no” hundred_percent_height=”no” hundred_percent_height_scroll=”no” align_content=”stretch” flex_align_items=”flex-start” flex_justify_content=”flex-start” hundred_percent_height_center_content=”yes” equal_height_columns=”no” container_tag=”div” hide_on_mobile=”small-visibility,medium-visibility,large-visibility” status=”published” border_style=”solid” box_shadow=”no” box_shadow_blur=”0″ box_shadow_spread=”0″ gradient_start_position=”0″ gradient_end_position=”100″ gradient_type=”linear” radial_direction=”center center” linear_angle=”180″ background_position=”center center” background_repeat=”no-repeat” fade=”no” background_parallax=”none” enable_mobile=”no” parallax_speed=”0.3″ background_blend_mode=”none” 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bordercolor=”” borderradius=”” align_medium=”none” align_small=”none” align=”center” lightbox=”no” gallery_id=”” lightbox_image=”” lightbox_image_id=”” alt=”” link=”” linktarget=”_self” animation_type=”” animation_direction=”left” animation_speed=”0.3″ animation_offset=”” hide_on_mobile=”small-visibility,medium-visibility,large-visibility” sticky_display=”normal,sticky” class=”” id=”” filter_hue=”0″ filter_saturation=”100″ filter_brightness=”100″ filter_contrast=”100″ filter_invert=”0″ filter_sepia=”0″ filter_opacity=”100″ filter_blur=”0″ filter_hue_hover=”0″ filter_saturation_hover=”100″ filter_brightness_hover=”100″ filter_contrast_hover=”100″ filter_invert_hover=”0″ filter_sepia_hover=”0″ filter_opacity_hover=”100″ filter_blur_hover=”0″]https://lnunt.cidesi.com/wp-content/uploads/2021/08/IMG_20190115_172841-1-1024×768-1.png[/fusion_imageframe][/fusion_builder_column][fusion_builder_column type=”1_1″ align_self=”auto” content_layout=”column” align_content=”flex-start” 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Fig. 2. En la imagen se observa un depósito de aluminio y el plasma de iones de argón en el magnetrón Sputtering de CIDESI Querétaro. En los depósitos, la presión, comúnmente en el rango de mTorr y el flujo de argón son controlados y ajustados para un depósito óptimo.

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padding_right_small=”” padding_bottom_small=”” padding_left_small=”” padding_top=”” padding_right=”” padding_bottom=”” padding_left=”” hover_type=”none” border_sizes_top=”” border_sizes_right=”” border_sizes_bottom=”” border_sizes_left=”” border_color=”” border_style=”solid” border_radius_top_left=”” border_radius_top_right=”” border_radius_bottom_right=”” border_radius_bottom_left=”” box_shadow=”no” box_shadow_vertical=”” box_shadow_horizontal=”” box_shadow_blur=”0″ box_shadow_spread=”0″ box_shadow_color=”” box_shadow_style=”” background_type=”single” gradient_start_color=”” gradient_end_color=”” gradient_start_position=”0″ gradient_end_position=”100″ gradient_type=”linear” radial_direction=”center center” linear_angle=”180″ background_color=”” background_image=”” background_position=”left top” background_repeat=”no-repeat” background_blend_mode=”none” render_logics=”” filter_type=”hover” filter_hue=”0″ filter_saturation=”100″ filter_brightness=”100″ filter_contrast=”100″ 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Depósitos y co-depósitos de materiales

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El Sputtering del cuarto limpio de CIDESI Querétaro tiene la capacidad de realizar co-depósitos y depósitos continuos de materiales antes de romper vacío, gracias a las 3 fuentes con las que cuenta, dos de las fuentes son DC y una RF. Este equipo, permite realizar desde un depósito o hasta tres depósitos de materiales al mismo tiempo, o si lo requiere la fabricación, depositar más de un material consecutivamente antes de abrir la cámara de depósito y por consecuencia, no romper el vacío, lo que nos da increíbles ventajas y posibilidades en la fabricación de dispositivos y sensores. Ver Fig.3.

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Fig. 3. El sistema de depósito con el que cuenta el cuarto limpio de CIDESI Querétaro permite realizar depósitos y co-depósitos, gracias a dos fuentes DC de 1000 W y una RF de 600 W.

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Este sistema lo tenemos dedicado para el depósito de semiconductores, metales y algunos dieléctricos. Algunos de los materiales que tenemos disponibles en el cuarto limpio para depositar en el magnetrón Sputtering son: ITO, ZnO, Al, Ti, TiN, Si3N4, WO3, Bi, MgF2, Cr, Ni y SiO2, entre otros, principalmente.
Esta capacidad de depositar diferentes materiales nos permite trabajar en el desarrollo de sensores que van desde micro bolómetros, sensores magnéticos, detección de glucosa hasta la detección de contaminantes en el aire, entre varios más.

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Depositando con fuentes DC y RF

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El equipo Sputtering del cuarto limpio de CIDESI Querétaro cuenta con dos fuentes DC y una RF, las fuentes DC, frecuentemente son utilizadas para realizar depósitos de targets conductores o de óxidos conductores transparentes, una de las fuentes DC, tiene una configuración especial en el magnetrón, está configuración ayuda a la generación del plasma ya que utiliza un fuerte campo magnético, y esto, la hace especial para realizar depósitos de materiales magnéticos. La fuente RF, la utilizamos para depósitos de materiales con propiedades aislantes como óxidos, nitruros y cerámicos, específicamente estos materiales, tienen la característica de tener una impedancia grande, la cual cambia con la frecuencia de la potencia aplicada en el depósito.

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Fig. 4. En la imagen podemos observar la instalación de un target de Nickel, un material con propiedades magnéticas, para depósitos de materiales magnéticos, la fuente DC debe tener una configuración especial en el magnetrón para generar un campo magnético fuerte durante el depósito.

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Magnetron Sputtering

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Los tres cañones con los que cuenta el sistema Sputtering del cuarto limpio de CIDESI Querétaro, están equipados con un magnetron, este magnetron implementa un fuerte campo magnético que confina los electrones en el plasma cerca de la superficie del target. El contar con un magnetrón en cada una de las fuentes del sistema Sputtering, permite incrementar la tasa de depósito de los materiales y además previene el posible impacto de estos electrones en el material que se está depositando, lo que por consecuencia se ve reflejado en la calidad del depósito.

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Depósitos de materiales con atmósfera reactiva

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Entre las capacidades de los sistemas de depósito por Sputtering, existe la posibilidad de realizar oxidaciones y nitruración de materiales durante el depósito. Los fenómenos físicos mencionados, se obtienen cuando gases reactivos son introducidos en la cámara del Sputtering durante el depósito de películas delgadas de materiales, estos gases comúnmente son oxígeno o nitrógeno. Actualmente, en el cuarto limpio de CIDESI Querétaro, nos encontramos trabajando en una actualización al sistema Sputtering, esta actualización consiste en habilitar la capacidad de depositos con atmósfera reactiva de oxígeno, el objetivo será tener presiones parciales de oxígeno durante el depósito y controlar mejor la estequiometria en los depósitos, principalmente en el depósito de dieléctricos y óxidos semiconductores.

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¿Qué características para depósito de materiales tiene el magnetron Sputtering?

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A parte de las opciones de co-depósito y depósito continuo de materiales antes de romper vacío, el equipo también cuenta con las siguientes capacidades:

• Rotación y calefacción del porta muestras de hasta 50 rpm. y 650 °C, respectivamente, ver Fig. 4.
• Depósito simultaneo de hasta tres obleas de cuatro pulgadas
• El depósito de materiales puede ser controlado por  software (control PID), donde se monitorea el rate de deposito en angstrom/segundo
• El espesor de las películas depositadas es monitoreado por un sensor inficon
• Finalmente, el equipo es respaldado por una bomba mecánica y una bomba turbo molecular que permite alcanzar presiones base de hasta 5 x 10 ^-7 Torr, con el objetivo de evitar contaminación en los materiales que se estan depositando.

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Fig. 5. En la imagén se observa el interior de la camara de deposito, la iluminacion se debe a que el portamuestras esta siendo acondicionado para un deposito con temperatura.

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Finalmente…

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En la bahía de metalización del cuarto limpio de CIDESI,  contamos con un sistema de evaporación por e-beam, este sistema es excelente y con él, depositamos una amplia gama de materiales como metales, dieléctricos y semiconductores. Sin embargo, nuestro sistema Sputtering, se diferencia del sistema ebeam, por que no necesita que los materiales a depositar alcancen temperaturas tan altas como para fundirse, lo que le da la ventaja que casi cualquier material se pueda depositar por Sputtering, y tercero, los materiales que se depositan, tienen propiedades muy similares a los targets con los que se trabaja.

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Fig. 6. En la imagen se observa una oblea de silicion con recubrimiento de óxido de zinc por magnetrón Sputtering, el óxido de zinc, es un semiconductor muy recurrido en la fabricación de sensores y dispositivos electrónicos.

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