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The drying process is a critical step, for the manufacture of microelectromechanical systems (MEMS) with micrometric dimensions, this is due to the fact that the working liquids like deionized water or Isopropyl alcohol, cause the moving parts of the device, such as cantilevers, could remain adhered to other components of the device and make the degrees of movements of these components impossible, and consequently, breaking them. To avoid these adhesion problems of moving parts of the devices, drying must be done using the critical point drying technique or “Critical Point Dryer” (CPD). The clean room of the Microtechnologies Division at CIDESI has a tool to carry out the CPD drying process, which avoids the problems caused by surface tension and capillarity forces that can damage the manufactured structures.
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